| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the accurate measurement of the equivalent refractive index and attenuation coefficient of an overall thin film even if it is a metallic thin film with different physical properties along its thickness. SOLUTION: This device is formed of a reflectance measuring unit 30 with an X-Y stage 26 to measure reflectance by converting incident light from a light source into a single-wavelength form at a spectroscope (monochromator) to a sample 10 placed on the X-Y stage 26, passing the light rays converted into a single-wavelength form through a slit 23, and making the light incident approximately vertically onto the sample thin film, a phase difference and transmissivity measuring unit 50 to introduce the transmitted light incident vertically onto the sample by rotating total reflection mirrors 24 and 25 to a phase difference interferometer 40 and to measure a phase difference 6 and a transmissivity T, and a computer 60 with a program to compute the refractive index and attenuation coefficient of the thin film from the reflectance, transmissivity, and phase difference.</p> |
