Heating treatment method and apparatus

摘要

A heating treatment method includes the steps of: preparing an array of heating chambers (R1-R6), the heating chambers being respectively provided with heaters and connected in series; transporting an object (2) to be heating from an upstream side toward a downstream side of the array to allow the object to pass through the heating chambers; supplying and discharging a warm air flow to and from each heating chamber, and controlling an amount of each discharged warm air flow to generate an air flow travelling along a direction in which the object is raised in temperature.