Universal reticle transfer system

摘要

A specially adapted SMIF pod ( 20 ) receives and holds one particular type of reticle cassette ( 36 ) or reticle holder ( 132 ) selected from among dozens of different configurations thereof. The SMIF pod ( 20 ) may be interrogated to determine the particular type of reticle cassette ( 36 ) or reticle holder ( 132 ) carried therein. A reticle transfer system ( 50 ) receives a pair of such SMIF pods ( 20 ), interrogates each of the SMIF pods ( 20 ) to ascertain which type of reticle cassette ( 36 ) or reticle holder ( 132 ) the SMIF pod ( 20 ) carries, and automatically moves reticles ( 42 ) through a controlled environment from one reticle cassette ( 36 ) or reticle holder ( 32 ) to another reticle cassette ( 36 ) or reticle holder ( 132 ). A reticle reorienter ( 56 ) includable in the system ( 50 ) also permits automatically exchanging reticles ( 42 ) between a reticle carrier ( 144 ) and a reticle cassette ( 36 ) or reticle holder ( 132 ).