| 发明名称 |
Moving apparatus, exposure apparatus, and device manufacturing method |
| 摘要 |
A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable element.
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| 申请公布号 |
US7319283(B2) |
申请公布日期 |
2008.01.15 |
| 申请号 |
US20050167180 |
申请日期 |
2005.06.28 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KOIDE HIROYUKI |
| 分类号 |
H01L21/68;H02K41/00;G03F7/20;H01L21/027;H02K16/00;H02K41/02 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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