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发明名称
VERFAHREN ZUR HERSTELLUNG VON SELBJUSTIERENDEN L- FÖRMIGEN SEITENWAND-ABSTANDSSTÜCKEN
摘要
申请公布号
AT381777(T)
申请公布日期
2008.01.15
申请号
AT20010480050T
申请日期
2001.06.15
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING PTE LTD.
发明人
SUBHASH, GUPTA;YELEHANKA, PRADEEP;VIJAI, CHHAGAN
分类号
H01L21/336;H01L21/266;H01L21/308;H01L21/311;H01L29/78
主分类号
H01L21/336
代理机构
代理人
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