| 摘要 |
A substrate processing apparatus is provided to align a substrate by properly transferring a substrate on a transfer robot arm. A timing belt(212) surrounds a robot body(211), positioned on the robot body and having a step on which a substrate is placed to be transferred. A driving part(214) drives the timing belt to rotate the substrate placed on the timing belt. A belt pulley(213) holds the timing belt to prevent the timing belt from being separated from the robot body. A sensor(216) senses the position of the substrate, installed in a region of the robot body where the substrate is to be placed.
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