| 摘要 |
Disclosed is a method for drying a surface of a disc-shaped article comprising covering said surface with a rinsing liquid, whereby a closed liquid layer (L) is formed, and removing said rinsing liquid, wherein said rinsing liquid containing at least 50wt.% water and at least 5wt.% of a substance, wherein the substance lowers the surface energy of water, wherein said removing of the liquid is initiated by blowing gas onto said closed liquid layer, whereby the closed liquid layer is opened at on discrete area (A). |
