| 摘要 |
PROBLEM TO BE SOLVED: To enable a movable plate to be driven at a large oscillation angle even with a low driving voltage, in a micro-oscillating device applicable to an optical element. SOLUTION: The optical element 1 is provided with the movable plate 2 and a supporting part 3a supporting a beam 4 retaining the movable plate in an oscillating manner. The beam is provided with a twist beam 40 consisting of two beam pieces 4a, and a movable electrode part 4b and a supporting beam 4c supporting their ends. A vertical electrostatic comb 5 is formed in the end of the movable plate 2 and a frame part opposed thereto, and a horizontal electrostatic comb 6 is formed in the movable electrode part 4b and a frame part opposed thereto. The movable plate 2 oscillates while twisting the twist beam 40 by a driving force generated by the vertical electrostatic comb 5. The horizontal electrostatic comb 6 generates a driving force according to the drive of the vertical electrostatic comb 5, and it alters the interval between the ends of the two beam pieces 4a periodically, and changes the twist rigidity of the twist beam 40. The movable plate 2 oscillates with parametric resonate, which enlarges the oscillation angle. COPYRIGHT: (C)2008,JPO&INPIT
|
