ASSISTING APPARATUS FOR A WAFER CASSETTE

摘要

An assisting apparatus for a wafer cassette is provided to prevent wafers from colliding with each other by adjusting a slope of the wafer cassette by adjusting a slant angle of a working mount. An assisting apparatus for a wafer cassette includes a guide frame(207) having first and second guide slot plates(202,203) and at least one connector lever(205). Sidewalls of the first and second guide slot plates are coupled with each other through the connecting lever. The first and second guide slot plates form guide slots(204) corresponding to positions of wafer cassette slots, which are formed on the wafer cassette. A width of the guide slot is gradually decreased toward a center thereof. The guide frame is connected to the wafer cassette in series, such that the guide slot is connected to the corresponding wafer cassette slot.