| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method using bubbles of a detergent and an apparatus therefor, in each of which minute bubbles of the detergent, which are excellent in floating/diffusing properties, are supplied in spray states into a closed space surrounding a part to be cleaned instead of mists of the detergent to spread components of the detergent all over the closed space and improve the cleaning performance. SOLUTION: Minute bubbles 2 of the detergent, the outside surface of each 2a of which is covered with a thin film 2b containing components of the detergent and which are excellent in floating/diffusing properties, are supplied into the closed space in a bath (the part to be cleaned) 20. Since minute bubbles 2 of the detergent are spread uniformly all over the closed space in the bath 20 by means of the excellent floating/diffusing properties thereof, components of the detergent are spread uniformly all over the closed space in the bath 20, so that the cleaning performance can be improved. COPYRIGHT: (C)2008,JPO&INPIT
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