| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY-stage with function capable of measuring and holding the position coordinate value of an interferometer from a range detection value of the interferometer itself without introducing any special means of measurement. SOLUTION: The XY-stage including three or more interferometers prepared steadily along X-axis and Y-axis directions of a platen, respectively, and a slider, which mounts a bar mirror reflecting irradiating beam of these interferometer, moving on the aforementioned platen, which detects not only the position of the aforementioned slider by switching the aforementioned interferometers but also the rotation angles around Z-axis of the aforementioned slider based on two range detection values out of the aforementioned interferometers and distance between interferometers, is equipped with coordinate value measuring means for measuring the position coordinate value of each of the aforementioned interferometer from the range detection values of those interferometers themselves, a coordinate value memory means holding measured coordinate value information of the aforementioned interferometers, and a slider position correcting means correcting the detected positions of the aforementioned slider from aforementioned coordinate value information read from the coordinate value memory means concerned. COPYRIGHT: (C)2008,JPO&INPIT
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