| 摘要 |
<p>A device for recycle-supplying thinner is provided to improve the recovery rate of the thinner since the thinner is recycled by removing impurities using an isolation film of a recovery liquid purifying mechanism. A device for recycle-supplying thinner includes a supply storing bath(1), a recovery liquid purifying mechanism(2), a crude liquid supplying mechanism(3), and a concentration meter(5). The supply storing bath stores thinner to be supplied. The recovery liquid purifying mechanism purifies the used thinner and supplies the thinner to the supply storing bath. The crude liquid supplying mechanism supplies crude liquid of the thinner. The concentration meter detects the concentration of impurities contained in the purified thinner by using any one of the velocity of ultrasonic waves, electronic conductivity, and absorbance.</p> |
