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发明名称
摘要
申请公布号	JP2008500741(A)	申请公布日期	2008.01.10
申请号	JP20070527300	申请日期	2005.05.12
申请人		发明人
分类号	H01L21/316;C23C16/40;C23C16/455;C23C16/56;H01L21/28;H01L21/314;H01L21/318;H01L21/822;H01L27/04;H01L29/78	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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