| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high functional antireflection film provided with hydrophilicity. <P>SOLUTION: The antireflection film has a low refractive index transparent film on the outermost surface and a high refractive index transparent film provided to the lower layer of the low refractive index transparent film. The high refractive index transparent film is the antireflection film of a titanium oxide film deposited by a gas flow sputtering method. The titanium oxide film deposited by the gas flow sputtering method shows high photocatalytic activity in an as-deposition state where a substrate is not heated and even when the low refractive index transparent film is deposited on the titanium oxide film, the hydrophilicity due to the titanium oxide film present on the lower layer of the low refractive index transparent film is attained and in addition, excellent antireflection performance due to the lamination of the titanium oxide film and the low refractive index transparent film is exhibited. Furthermore, the hydrophilicity due to the titanium oxide film of the lower layer is further improved by making the low refractive index transparent film on the titanium oxide film be a low density film deposited by high speed deposition by the gas flow sputtering method. <P>COPYRIGHT: (C)2008,JPO&INPIT |
