摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source with extremely smaller surplus current than in a conventional one. <P>SOLUTION: The electron source is composed of a <100> orientation single crystal rod 1 of tungsten or molybdenum with an electron discharging part on one end, and is provided with a dispersing source 2 composed of metallic element oxide selected from Ca, Sr, Ba, Sc, Y, La, Ti, Zr, Hf or lanthanide series. The electron source has granular material covering a ä100} crystal surface on a side surface of the rod. Preferably, the granular material is composed of metallic element oxide selected from Ca, Sr, Ba, Sc, Y, La, Ti, Zr, Hf or the lanthanide series. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |