| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a porous body where a porous body in which many pores are formed can be inexpensively produced. SOLUTION: The production method comprises: a discontinuous film formation stage where discontinuous films 2 are formed on the surface 1a of an Si base material 1 having <110> crystal orientation; and an anisotropic etching stage where, with the discontinuous films 2 as masks, the surface 1a of the base material 1 is subjected to anisotropic etching by wet etching using an NaOH aqueous solution, a KOH aqueous solution or a TMAH aqueous solution, so as to obtain a porous body 6 in which many holes 5 are formed. COPYRIGHT: (C)2008,JPO&INPIT
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