| 摘要 |
PROBLEM TO BE SOLVED: To provide a short-wavelength electromagnetic wave generating device which is suppressed in deterioration due to incidence of an electron beam in an optical system, used to make a laser beam collide against an electron beam. SOLUTION: The short-wavelength electromagnetic wave generating device has a vacuum container in which an electron beam track where an electron scatters is demarcated, an incidence window for introducing the laser beam into the vacuum container, an optical deflector which changes the traveling direction of the laser beam introduced into the vacuum container from the incidence window when disposed at a first position by the electron beam track to make the laser beam cross the electron beam track, and a moving mechanism which moves the optical deflector between a second position, more distant from the electron beam track than the first position, and the first position. COPYRIGHT: (C)2008,JPO&INPIT
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