Method for testing chips electrically

摘要

The method involves disposing chips (2) on a chuck (6) with sides of the chips opposite to a film (4). The chips are contacted by a measuring needle (1) penetrating the film that is moved relative to the chips. An electrical measuring procedure is performed, and the measuring needle is heated. A camera system is used for location detection of the chips. A relative movement is terminated for contacting between the measuring needle and the chips when reaching a desired value in an electrical measuring system, and a measuring mode is started.