摘要 |
The invention describes a method of determining the position of fluorescent markers in a sample ( 4 ), with a high spatial resolution. To this end, the sample ( 4 ) is illuminated with an exciting light beam ( 11 ), while the sample ( 4 ) is simultaneously scanned by a particle beam ( 3 ). During scanning, markers will be impinged upon by the particle beam ( 3 ) and will be damaged, in such a manner that the marker impinged upon will no longer emit fluorescence radiation. This leads to a reduction of the flux of fluorescence radiation. This reduction is detected. Seeing as the position of the particle beam ( 3 ) w.r.t. the sample is known at the moment that the marker is damaged, the position of the marker in the sample is, accordingly, also known.
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