APPARATUS FOR SUPPORTING A WAFER BEING OUT OF CONTACT WITH THE WAFER,申请号KR20060060844-传众专利搜索

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发明名称	APPARATUS FOR SUPPORTING A WAFER BEING OUT OF CONTACT WITH THE WAFER
摘要
申请公布号	KR100793006(B1)	申请公布日期	2008.01.08
申请号	KR20060060844	申请日期	2006.06.30
申请人		发明人
分类号	H01L21/02;H01L21/68	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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