System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern on thin film magnetic disks and silicon wafers,申请号AU20000079963-传众专利搜索

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发明名称	System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern on thin film magnetic disks and silicon wafers
摘要
申请公布号	AU7996300(A)	申请公布日期	2001.05.10
申请号	AU20000079963	申请日期	2000.10.06
申请人	CANDELA INSTRUMENTS	发明人	STEVEN W. MEEKS;RUSMIN KUDINAR
分类号	G01B11/06;G01B11/30;G01N21/21;G01N21/47;G01N21/95;G11B5/84	主分类号	G01B11/06
代理机构		代理人
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