摘要 |
A method of manufacturing an LCD is provided to reduce the number of masks for forming a TFT(thin film transistor) by forming an active pattern and a storage electrode through one mask process. A first substrate is provided. The first substrate is divided into a pixel area and first and second circuit areas. An active pattern(224') is formed in the pixel area and the circuit areas, and a storage electrode(230") is formed over a predetermine region of the active pattern in the pixel area. A first insulating layer is formed on the first substrate. First and second conductive layers are formed on the first substrate. The first and second conductive layers are patterned to form a gate electrode formed of the second conductive layer in the first circuit area and form a p+ source/drain region in a predetermined region of the active pattern in the first circuit area. The first and second conductive layers are patterned to form a gate electrode formed of the second conductive layer in the pixel area and the second circuit area, form a common line(208) formed of the second conductive layer in the pixel area, and form a pixel electrode(218) formed of the first conductive layer in the pixel area. An n+ source/drain region is formed in a predetermined region of the active pattern in the pixel area and the second circuit area. First and second interlayer insulating layers are formed on the first substrate. A portion of a first gate insulating layer, and the first and second interlayer insulating layers is removed to form a first contact hole(240a) and a second contact hole(240b) that expose a source region and a drain region of the active pattern. A portion of the first and second interlayer insulating layers is removed to form a hole that opens the pixel area. A source electrode(222) that is electrically connected with a source region of the active pattern through the first contact hole is formed, and a drain electrode(223) that is electrically connected with the drain region of the active pattern through the second contact hole is formed. A second substrate is provided. A liquid crystal layer is formed at any one of the first and second substrates. The first substrate is attached to the second substrate.
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