| 摘要 |
A cassette transfer system and a transfer method using the same are provided to enable self-transfer of cassettes between a loader and an unloader without a help of a separate transfer unit such as a CTV(Cassette Transfer Vehicle), thereby carrying the cassettes quicker and corrector and minimizing the possibilities of generating a foreign substance. A cassette transfer system comprises process equipment(52), a loader(62), an unloader(72), a cassette moving path(80), and an up/down unit(100). The process equipment, the loader, and the unloader are disposed on the same plane. The cassette moving path has a first vertical space(84a), a second vertical space(84b), and a horizontal space(86). The first vertical space is toward a vertical down direction from the loader. The second vertical space is toward a vertical down direction from the unloader. The horizontal space connects the first and the second vertical spaces in a lower height than the process equipment. The up/down unit is mounted within the cassette moving path and carries cassettes(C) between the loader and the unloader by ascent and descent in the first and second vertical spaces and traveling along the horizontal space. |
