| 摘要 |
A chamber structure of a test handler and a tray transferring method are provided to facilitate set of the temperature atmosphere for testing a semiconductor device, by making the temperature flow of the inner upper and lower sides of a chamber smooth and to reduce the volume of the chamber by rotating a tray in the chamber. A chamber structure of a test handler for testing a tray(T) equipped with semiconductor devices in a chamber(70) is composed of an exchanging unit(50) installed in the chamber to rotate the test tray equipped with the semiconductor device; a transferring device(80) installed at the lower side of the exchanging unit to deliver the trays in one direction; a lifting device(90) for moving up and down the trays individually delivered from the transferring device; and an opening and closing unit(71) formed at one side of the chamber, wherein the test tray goes in or out through the opening and closing unit. |
