| 摘要 |
A suction unit for removing particles is provided to prevent particles, generated during a drilling process for a repair process, from being distributed into the clean room to pollute a clean room and an LCD(Liquid Crystal Display). A particle suction unit(910) is connected with an external air suction device and sucks particles generated during a drilling process for a substrate. An air supply unit(920) is connected with an external air supply device and ejects air during the drilling process. A main body(930) is formed in a shape of a cylinder of which a central part is opened so that a micro drill for the drilling process can be inserted. Within the main body, at least one or more particle suction units and at least one or more air supply units are formed. |
