| 摘要 |
A valve door including a ball coupling is provided to minimize generation of undesired particles related to the binding of rotating components by including a curbed sealing surface and a flexible coupling and receiving variation of a protrusion length of a door while using the flexible coupling. A chamber includes a chamber body(312), a door member(402), a lever arm(413) and a ball joint(460). The chamber body has a first substrate transfer port. The door member has a sealing surface positioning to selectively seal the first substrate transfer port. The ball joint connects the lever arm to a slit valve door, rotating the lever arm around at least two axes. The chamber includes a second ball joint and a second lever arm. The second lever arm includes a first end coupled to a second shaft disposed through the chamber body and a second end coupled to a second end of a slit valve door member by the second ball joint.
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