发明名称 |
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER |
摘要 |
In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.
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申请公布号 |
US2008003158(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
US20070673542 |
申请日期 |
2007.02.09 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAOUX SEBASTIEN;LIN KUO-CHEN;VERMEULEN ROBBERT M.;CLARK DANIEL O.;TSU STEPHEN;MOALEM MEHRAN;FOX ALLEN;MCINTOSH MONIQUE;PUTZ JOSHUA;RIESKE ERIC;LEE POH S. |
分类号 |
C01B7/20;C01B17/00;C01B21/00;C07C1/00 |
主分类号 |
C01B7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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