Material processing method for semiconductor lasers

摘要

Embodiments in accordance with the present invention relate to the use of precise etching techniques in the construction of high quality lasers. In accordance with one embodiment of the present invention, Focused Ion Beam Etching (FIBE) of a semiconductor stripe in a multi-mode edge-emitting Fabry-Perot (FP) laser may allow the rapid and effective fabrication of a single mode laser and/or a surface emitting laser. The use of FIBE or other precise etching techniques allows precise control over the dimension, angle, and orientation of etched features, and offers extremely smooth surfaces that reduce optical loss in the resulting device.