发明名称 |
Ozonated Water Flow and Concentration Control Apparatus and Method |
摘要 |
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
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申请公布号 |
US2008002518(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
US20070835161 |
申请日期 |
2007.08.07 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
FITTKAU JENS;SEIWERT JOHANNES;GOTTSCHALK CHRISTIANE |
分类号 |
B01F15/02;B01F1/00;C01B13/00;C01B13/10;C02F1/78;G05D11/02;G05D21/00;H01L21/02;H01L21/304 |
主分类号 |
B01F15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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