发明名称 |
Apparatus with fillet radius joints |
摘要 |
A wafer holding apparatus including a plurality of rods joined at opposite ends to endplates by joints having flanges with a fillet radius. The joints which join the component parts of the apparatus provide a stable wafer holding apparatus for manual handling as well as for the harsh processing conditions of semiconductor wafer processing chambers.
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申请公布号 |
US2008000851(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
US20070809584 |
申请日期 |
2007.06.01 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
PICKERING MICHAEL A.;GOELA JITENDRA S.;TRIBA JAMIE L.;PAYNE THOMAS |
分类号 |
A47G19/08 |
主分类号 |
A47G19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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