| 摘要 |
A vaporization apparatus is provided to accelerate vaporization in a chamber, offer information on a filter replacement time, improve supply of vaporization gas, and prevent the vaporization gas from being solidified. A vaporization apparatus(10) comprises an inflow chamber(100) in which a liquid raw material is vaporized, a discharge chamber(200) which induces gas vaporized in the inflow chamber into a process chamber, and which has at least one disc(240) with at least one through hole(242), a bracket(400) for fixing the inflow chamber and the discharge chamber to each other, at least one capillary tube(500) disposed along an outer periphery of the bracket such that the inflow chamber and the discharge chamber are in communication with each other, a pair of induction pipes(322,312) installed at one side of the inflow chamber to supply the liquid raw material and a carrier gas into the inflow chamber, a nozzle part(314) for causing the liquid raw material and the carrier gas from the induction pipes to be injected in one direction and mixed with each other, and a buffer plate(330) for finely decomposing and diffusing the liquid raw material and the carrier gas that are injected from the nozzle part.
|
