发明名称 Tin deposition
摘要 A device includes an integrated circuit and a deposited tin in electrical contact with a portion of the integrated circuit. The deposited tin is formed by electrodeposition from a bath. The deposited tin includes a residue characteristic of the bath. The bath includes a bath-soluble tin compound, a strong acid, and a sulfopropylated anionic surfactant. In another aspect, a composition includes between approximately 20 and 40 grams per liter of one of stannous methane sulfonate, stannous sulfate, and a mixture thereof, between approximately 100 and 200 grams per liter of one of methanesulfonic acid, sulfuric acid, and a mixture thereof, and between approximately 1 and 2 grams per liter of one or more polyethyleneglycol alkyl-3-sulfopropyl diethers. In another aspect, a method includes electroplating tin with a current density of greater than approximately 30 mA/cm2 and a plating efficiency of greater than approximately 95%.
申请公布号 US7314543(B2) 申请公布日期 2008.01.01
申请号 US20030685659 申请日期 2003.10.14
申请人 INTEL CORPORATION 发明人 FANG MING;DUBIN VALERY M.;HAIGHT SCOTT M.
分类号 C25D5/02;C25D3/30;C25D3/32;C25D7/12;H01L21/288;H01L21/60 主分类号 C25D5/02
代理机构 代理人
主权项
地址