| 摘要 |
<p>PROVISION IS MADE OF A DICING APPARATUS, FOR DICING A PLATE-LIKE WORKPIECE, COMPRISING A DISK-LIKE BLADE (40) WHICH ROTATES TO FORM A GROOVE (30) IN ONE SURFACE OF THE WORKPIECE; A WATER DISCHARGING PORTION (50) WHICH DISCHARGES WATER TOWARD A BOTTOM (33) OF THE GROOVE (30) OF THE ONE SURFACE OF THE WORKPIECE TO FORM A STREAM OF WATER (60); AND A LASER LIGHT IRRADIATING PORTION WHICH IRRADIATES A LASER LIGHT (70) IN THE STREAM OF WATER (60) AND IMPINGES THE LASER LIGHT (70) ONTO THE BOTTOM (33) OF THE GROOVE (30) WHILE REFLECTING THE LASER LIGHT (70) BY AN INNER WALL OF THE STREAM OF WATER (60) TO REMOVE THE PORTION OF THE WORKPIECE EXTENDING FROM THE BOTTOM (33) OF THE GROOVE (30) TO THE OTHER SURFACE OF THE WORKPIECE, SO AS TO DICE THE WORKPIECE.(FIG 5)</p> |
