| 发明名称 |
SUBSTRATE PROCESSING APPARATUS, DISPLAY METHOD, RECORDING MEDIUM, AND PROGRAM |
| 摘要 |
<p>[PROBLEMS] To make it possible to display a superlatively convenient maintenance screen on a display panel when maintenance is performed while considering mutual relationships between a plurality of processing chambers. [MEANS FOR SOLVING PROBLEMS] Task buttons are displayed in a second display area (312) so that they are arranged from the left side in order of the time at which each of the task buttons has been clicked. This makes it possible to display a superlatively convenient maintenance screen on a touch panel (300) when a maintenance is performed.</p> |
| 申请公布号 |
WO2007148426(A1) |
申请公布日期 |
2007.12.27 |
| 申请号 |
WO2007JP00523 |
申请日期 |
2007.05.15 |
| 申请人 |
TOKYO ELECTRON LIMITED;HOSOKAWA, HIROYUKI;SAKAI, RYOJI;OKUYAMA, MASASHI |
发明人 |
HOSOKAWA, HIROYUKI;SAKAI, RYOJI;OKUYAMA, MASASHI |
| 分类号 |
H01L21/02;H01L21/205;H01L21/3065 |
主分类号 |
H01L21/02 |
| 代理机构 |
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