发明名称 APPARATUS AND TOOL FOR MEASURING OPTICAL DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To inexpensively measure characteristics of a device under test relatively accurately. <P>SOLUTION: There are provided a measuring tool 50 and a measuring section (various members for terminal connection, circuits or the like). The measuring tool 50 comprises a light emitting element 151 for emitting light with which the device under test (DUT10) is irradiated; a reflecting member 154 partly opened; and a light receiving device (monitor PD22) for receiving monitoring light emitted from the light emitting element 151 and passing through an opening 154A in the reflecting member 154, and generating an output in response to the amount of the received light. The measuring section implements measurement of characteristics of the DUT10, and at least one of correction of a measured result based on an output of the monitor PD22 and of power supply and control to the DUT10 at the time of the measurement. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007335651(A) 申请公布日期 2007.12.27
申请号 JP20060166052 申请日期 2006.06.15
申请人 SONY CORP 发明人 KATO KIKUFUMI
分类号 H01L21/66;G01M11/00;G01R31/26;H01L31/10 主分类号 H01L21/66
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