摘要 |
<P>PROBLEM TO BE SOLVED: To inexpensively measure characteristics of a device under test relatively accurately. <P>SOLUTION: There are provided a measuring tool 50 and a measuring section (various members for terminal connection, circuits or the like). The measuring tool 50 comprises a light emitting element 151 for emitting light with which the device under test (DUT10) is irradiated; a reflecting member 154 partly opened; and a light receiving device (monitor PD22) for receiving monitoring light emitted from the light emitting element 151 and passing through an opening 154A in the reflecting member 154, and generating an output in response to the amount of the received light. The measuring section implements measurement of characteristics of the DUT10, and at least one of correction of a measured result based on an output of the monitor PD22 and of power supply and control to the DUT10 at the time of the measurement. <P>COPYRIGHT: (C)2008,JPO&INPIT |