| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum vapor-deposition apparatus for forming a thin film of an organic compound while preventing a plurality of different types of evaporation sources from contaminating each other. <P>SOLUTION: The vacuum vapor-deposition apparatus 100 comprises: deposition-preventing vessels 140, 150 which accommodate each a first evaporation source 120 having a crucible 121 filled with an organic evaporation material 124, and a second evaporation source 130 having a crucible 131 filled with an organic evaporation material 134, both on the bottom face of a vacuum chamber 110; wherein by the rotation of the motor 162, the shutter 160 sequentially opens both the first evaporation source 120 and the second evaporation source 130 one by one, and thus the organic thin film made from the organic evaporation materials 124 and 134 is formed on the surface of a large number of substrates 10 mounted on the substrate holder 170. <P>COPYRIGHT: (C)2008,JPO&INPIT |
