METHOD FOR DETECTING DEFECT OF TFT ARRAY SUBSTRATE, AND DEFECT DETECTOR OF TFT ARRAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To detect a fine defect in a TFT array substrate. SOLUTION: The method for detecting and classifying pixel defects of the TFT array substrate includes a signal acquiring step for acquiring a detection signal from a plurality of detection signal acquiring points in one pixel and a signal processing step for dividing one pixel into a plurality of regions and performing defect judgement in the pixel using the divided region as one unit by using the detection signal in the detection signal acquiring point existing in each divided division processing region. In the signal acquiring step, the pixel is virtually divided into a plurality of divided regions and the detection signal is acquired from at least one detection signal acquiring point in each divided region. Therefore, the detection signal is acquired using at least divided fine region in one pixel as a unit. COPYRIGHT: (C)2008,JPO&INPIT