| 摘要 |
PROBLEM TO BE SOLVED: To aim at securement of reliability of airtightness retention and high-accuracy positioning between both substrates, through prevention of chips and cracks at their outer periphery. SOLUTION: A chamfered part 14 is arranged for each outer periphery of both substrates 1, 2, to be an engagement part with a manufacturing equipment. COPYRIGHT: (C)2008,JPO&INPIT
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