| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement system capable of reducing time and manpower and a measurement time that are imposed to a worker. SOLUTION: The surface region of an object S to be shape-measured is contained in an object range A to be judged from which measurement data is obtained. In this case, one region of the object S is present in the outside in the Z-axis direction of the range A and then it can be considered that an unmeasured surface region is present. Thus, a section for judging the presence of the unmeasured region judges that the measurement under the condition with a focal length being changed so that the measurement range is moved in the direction of the arrow mark Z1 is necessary. Meanwhile, no part of the surface region of the object S is contained an object range B to be judged from which measurement data is not obtained. In this case, no region of the object S is present in the outside in the Z-axis direction of the range B and then it can be considered that an unmeasured surface region is not present. Thus, a section 23 for judging the presence of the unmeasured region judges that the measurement under the condition with a focal length being changed so that the measurement range is moved in the direction of the arrow mark Z2 is not necessary. COPYRIGHT: (C)2008,JPO&INPIT
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