发明名称 CLEANLINESS MAINTAINING DEVICE FOR LIQUID STORED IN CONTAINER AND CLEANLINESS MEASURING/FEEDING SYSTEM FOR LIQUID STORED IN CONTAINER
摘要 PROBLEM TO BE SOLVED: To provide a cleanliness maintaining device for liquid stored in a container and a cleanliness measuring/feeding system for liquid stored in the container preventing mixing of foreign matter into the liquid at a time of discharge work discharging the liquid from the container without using a clean room. SOLUTION: The cleanliness maintaining device 10 (15, 16) for the liquid stored in the container for preventing foreign matter from mixing into the liquid S at a time of discharge work discharging the liquid S from the container 1 is provided with an outer hull body 17 provided with an opening part 7, and a clean air supply means 18 supplying clean air to an inside of the outer hull body 17 and feeding the clean air to an outer part from the opening part 7, and is constructed to cover surrounding of each of a discharge port 5 of the container 1 discharging the liquid and an outer air flow in port 6 taking outer air into the container 1 with accompanying discharge of the liquid S from the discharge port 5 by clean air fed from the opening part 7 at a time of discharge work of the liquid S. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007333331(A) 申请公布日期 2007.12.27
申请号 JP20060167311 申请日期 2006.06.16
申请人 SHIMIZU CORP 发明人 IMAISHI EIJI;SEKIGUCHI TAKASHI
分类号 F24F7/06;H01L21/304 主分类号 F24F7/06
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