发明名称 |
Solid state image pickup device and manufacturing method thereof |
摘要 |
A method of manufacturing a solid state image pickup device including photoelectric conversion elements which are two-dimensionally arranged in a semiconductor substrate, and a color filter having a plurality of color filter patterns differing in color from each other and disposed on a surface of the semiconductor substrate according to the photoelectric conversion elements. The method including the steps of successively subjecting a plurality of filter layers differing in color from each other to a patterning process to form the plurality of color filter patterns. At least one color filter pattern to be formed at first among the plurality of color filter patterns is formed by means of dry etching, and the rest of the plurality of the color filter pattern is formed by means of photolithography.
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申请公布号 |
US2007298164(A1) |
申请公布日期 |
2007.12.27 |
申请号 |
US20070889070 |
申请日期 |
2007.08.08 |
申请人 |
TOPPAN PRINTING CO., LTD. |
发明人 |
OGATA KEISUKE;FUKUYOSHI KENZO;ISHIMATSU TADASHI;NAKAO MITSUHIRO;KITAMURA SATOSHI |
分类号 |
B05D5/06 |
主分类号 |
B05D5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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