| 摘要 |
A charge monitoring device is described for monitoring charging effect during semiconductor manufacturing. In a first aspect of the invention, a charge storage MOS memory structure comprises a substrate body, an oxide-nitride-oxide structure that overlays a top surface of the substrate and extends above the edges between a source region and a drain region, and a polygate formed over the oxide-nitride-oxide structure. When a charging source, such as UV light or plasma, is projected onto the charge storage device, the polygate of the charge storage device protects the nitride layer from charging effect The light source charges side walls of the oxide-nitride-oxide structure.
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