发明名称 |
THIN FILM TRANSISTORS WITH POLY(ARYLENE ETHER) POLYMERS AS GATE DIELECTRICS AND PASSIVATION LAYERS |
摘要 |
The use of a poly(arylene ether) polymer as a passivation or gate dielectric layer in thin film transistors. This poly(arylene ether) polymer includes polymer repeat units of the following structure: <?in-line-formulae description="In-line Formulae" end="lead"?>-(O-Ar<SUB>1</SUB>-O-Ar<SUB>2</SUB>-O-)<SUB>m</SUB>-(-O-Ar<SUB>3</SUB>-O-Ar<SUB>4</SUB>-O)<SUB>n</SUB>-<?in-line-formulae description="In-line Formulae" end="tail"?> where Ar<SUB>1</SUB>, Ar<SUB>2</SUB>, Ar<SUB>3</SUB>, and Ar<SUB>4 </SUB>are identical or different aryl radicals, m is 0 to 1, n is 1-m, and at least one of the aryl radicals is grafted to the backbone of the polymer
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申请公布号 |
US2007296047(A1) |
申请公布日期 |
2007.12.27 |
申请号 |
US20070752722 |
申请日期 |
2007.05.23 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
KRETZ CHRISTINE P.;BURGOYNE WILLIAM F.JR.;MARKLEY THOMAS J. |
分类号 |
H01L29/786;C08G65/00;C08J3/28 |
主分类号 |
H01L29/786 |
代理机构 |
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地址 |
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