发明名称 THIN FILM TRANSISTORS WITH POLY(ARYLENE ETHER) POLYMERS AS GATE DIELECTRICS AND PASSIVATION LAYERS
摘要 The use of a poly(arylene ether) polymer as a passivation or gate dielectric layer in thin film transistors. This poly(arylene ether) polymer includes polymer repeat units of the following structure: <?in-line-formulae description="In-line Formulae" end="lead"?>-(O-Ar<SUB>1</SUB>-O-Ar<SUB>2</SUB>-O-)<SUB>m</SUB>-(-O-Ar<SUB>3</SUB>-O-Ar<SUB>4</SUB>-O)<SUB>n</SUB>-<?in-line-formulae description="In-line Formulae" end="tail"?> where Ar<SUB>1</SUB>, Ar<SUB>2</SUB>, Ar<SUB>3</SUB>, and Ar<SUB>4 </SUB>are identical or different aryl radicals, m is 0 to 1, n is 1-m, and at least one of the aryl radicals is grafted to the backbone of the polymer
申请公布号 US2007296047(A1) 申请公布日期 2007.12.27
申请号 US20070752722 申请日期 2007.05.23
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 KRETZ CHRISTINE P.;BURGOYNE WILLIAM F.JR.;MARKLEY THOMAS J.
分类号 H01L29/786;C08G65/00;C08J3/28 主分类号 H01L29/786
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