PROCESS FOR PRODUCING AMORPHOUS CARBON FILM

摘要

A process for amorphous carbon film production which comprises bringing bubbles (B) which have been generated in a liquid (L) comprising an organic compound and contain a plasma therein into contact with a surface of a substrate (S) to form an amorphous carbon film on the surface of the substrate (S), wherein the liquid (L) comprises one or more members selected among C1-12 alcohols and phenols. Thus, a rigid amorphous carbon film can be easily deposited.