SHOWER PLATE, PLASMA PROCESSING DEVICE USING THE SAME, PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a shower plate which is capable of dispensing with a cover plate. SOLUTION: The shower plate 105 is arranged in the processing chamber 102 of a plasma processing device and emits a plasma exciting gas so as to generate plasma in the processing chamber 102. The plate 105 is made of an integral structure, and a lateral hole 111 through which plasm exciting gas is introduced from the gas inlet port 110 of the plasma processing device and a vertical hole 112 communicating with the lateral hole 111 are provided to the shower plate 105. COPYRIGHT: (C)2008,JPO&INPIT