| 摘要 |
PROBLEM TO BE SOLVED: To vary the size of a work surface by achieving variable angular distribution. SOLUTION: An apparatus for generating an angular distribution is equipped with: a first homogenisation unit 10 equipped with a first substrate 1 having an incident surface and an emitting surface and a first lens array 4 through which the laser irradiation 17 can pass and which is formed on the incident surface and/or the emitting surface; and a second homogenisation unit 11 equipped with a second substrate 2 having an incident surface and an emitting surface and a second lens array 5 through which the laser irradiation 17 emitted from the first lens array 4 can pass and which is formed on the incident surface and/or the emitting surface. The laser irradiation 17, after exiting from the second homogenisation unit 11, has a comparably homogeneous angular distribution. The second homogenisation unit 11 has a third substrate 3 having an incident surface and an emitting surface further and a third lens array 6 formed on the incident surface and/or the emitting surface while leaving space from the second lens array 5. The distances d<SB>1</SB>and d<SB>2</SB>between the second and the third substrates 2 and 3 influence the angular distribution. COPYRIGHT: (C)2008,JPO&INPIT
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