| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device having a pattern for detecting probing deviation that has a small occupation area and can detect a direction in addition to the amount of positional deviation. <P>SOLUTION: A pair of patterns for detecting probing deviation is arranged at a scribe region adjacent to an IC chip. The pattern for detecting probing deviation comprises an inner conductor formed on a concentric circle and an outer conductor arranged with a small interval from the inner conductor. The outer conductor is divided into a plurality of pieces. With the means, a semiconductor device can be obtained, where the pattern for detecting probing deviation capable of also detecting the direction of deviation is formed with a small occupation area, when the position of a needle deviates in probing. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
