发明名称 NITROGEN ENRICHED COOLING AIR MODULE FOR UV CURING SYSTEM
摘要 A re-circulating cooling system can be used with a curing system in order to reduce the exhaust requirements for the system. Further, using a cooling fluid such as nitrogen reduces the production of ozone and the sealing requirements for the system. A simple heat exchanger can be used between return and supply reservoirs in order to remove heat added to the re-circulating fluid during circulation past the curing radiation source. The nitrogen can come from a nitrogen source, or from a membrane or other device operable to split feed gas into its molecular components to provide a source of gas rich in nitrogen. An ozone destruction unit can be used with such a cooling system to reduce the amount of ozone to acceptable levels, and to minimize consumption of the nitrogen. A catalyst can be used to deplete the ozone that does not get consumed during the reaction.
申请公布号 US2007295012(A1) 申请公布日期 2007.12.27
申请号 US20060556642 申请日期 2006.11.03
申请人 APPLIED MATERIALS, INC. 发明人 HO DUSTIN W.;ROCHA-ALVAREZ JUAN CARLOS;DU BOIS DALE R.;HENDRICKSON SCOTT A.;BALUJA SANJEEV;MUKUTI NDANKA O.
分类号 F25D3/12 主分类号 F25D3/12
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