发明名称 PROBE CARD COGNITION APPARATUS AND PROBE CARD COGNITION METHOD USING THE SAME
摘要 A probe card recognition apparatus and a probe card recognition method using the same are provided to recognize whether the probe card is operated normally by measuring a voltage value or a current value which are outputted by adding the voltage or the current value using the binary scale. A main body(110) is connected electrically to a plurality of probe cards. A signal supply unit(130) is connected to the main body electrically, and provides an input signal to each probe card. A signal measuring unit(140) is connected to the main body electrically, measures an output signal of each probe card about the input signal from the signal supply unit. A display unit(120) displays an operation state of the probe card by comparing a predetermined output signal value to the output value outputted from the measuring unit.
申请公布号 KR100787742(B1) 申请公布日期 2007.12.24
申请号 KR20060132074 申请日期 2006.12.21
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 LEE, CHAE WON
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址