| 摘要 |
A method is provided to economically and efficiently fabricate a light absorption layer for a solar cell by enabling the fabrication of a good-quality I-III-Vi2 compound with a composition ratio close to a chemical equivalent. A single precursor including III-group and VI-group elements is deposited on a substrate by an MOCVD(metal organic chemical vapor deposition) method to form a III-VI or III2-VI3 compound thin film(S101). A precursor including a I-group metal is deposited on the III-VI or III2-VI3 compound thin film by an MOCVD method to form a I+III+VI-group compound thin film made of I-group, III-group and VI-group elements(S102). The I+III+VI-group compound thin film is annealed in a gas atmosphere containing a VI-group element or a precursor including a VI-group element is deposited by an MOCVD method so as to form a I-III-VI2 compound thin film(S103). The I-group element can be Cu or Ag, the III-group element can be selected from In, Ga and Al, and the VI-group element can be selected from Se, Te and S.
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